By Parson A. L.

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And Asmussen, J. (2004). Fabrication and properties of ultranano, nano, and microcrystalline diamond membranes and sheets, J. Vac. Sci. Technol. B: Microelectron. , 22, pp. 2811–2817. 77. , and Auciello, O. (2008). Synthesis and characterization of smooth ultrananocrystalline diamond films via low pressure bias-enhanced nucleation and growth, Appl. Phys. , 92, pp. 133113–133116. 78. Wiora, M. (2013). Characterization of Nanocrystalline Diamond Coatings for Micro-Mechanical Applications, Doctoral dissertation, Ulm University, Germany.

189–193. 59. A. (1999). A review of techniques for polishing and planarizing chemically vapor- 41 42 Synthesis of Nanodiamond deposited (CVD) diamond films and substrates, Diamond Relat. , 8, pp. 1198–1213. 60. , and Donnet, C. (2000). “Tribology of diamond, diamondlike carbon and related films,” in Modern Tribology Handbook, ed. Bhushan, B. (CRC Press, Boca Raton), pp. 819–856. 61. C. (1999). Tribological characteristics and applications of superhard coatings: CVD diamond, DLC, and c-BN, Proc.

Grain size dependent mechanical properties of nanocrystalline References diamond films grown by hot-filament CVD, Diamond Relat. , 18, pp. 927–930. 72. A. (2007). Effects of grains’ features in surface roughness scaling, J. Appl. , 101, pp. 063507–1 - 063507– 7. 73. N. (2008). Surface acoustic wave properties of natural smooth ultra-nanocrystalline diamond characterized by laser-induced SAW pulse technique, Diamond Relat. , 17, pp. 446–450. 74. F. (2006). Growth rate improvements in the hot-filament CVD deposition of nanocrystalline diamond, Diamond Relat.

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