By Nadim Maluf, Kirt Williams

Bringing you recent with the most recent advancements in MEMS know-how, this significant revision of the best-selling An creation to Microelectromechanical structures Engineering provides you with a present realizing of this state of the art expertise. You achieve useful wisdom of MEMS fabrics, layout, and production, and learn the way it's being utilized in commercial, optical, clinical and digital markets. the second one variation positive aspects fresh sections on RF MEMS, picture MEMS, micromachining on fabrics except silicon, reliability research, plus an increased reference record.

With an emphasis on commercialized items, this designated source is helping you identify no matter if your software can reap the benefits of a MEMS answer, know the way different functions and corporations have benefited from MEMS, and choose and outline a manufacturable MEMS technique on your software. you find tips to use MEMS expertise to let new performance, increase functionality, and decrease dimension and price. The e-book teaches you the features and boundaries of MEMS units and procedures, and is helping you converse the relative benefits of MEMS in your company’s administration. From serious discussions on layout operation and technique fabrication of units and structures, to an intensive rationalization of MEMS packaging, this easy-to-understand e-book sincerely explains the fundamentals of MEMS engineering, making it a useful reference on your paintings within the box.

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Extra resources for An Introduction to Microelectromechanical Systems Engineering (2nd Edition)

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2. Crystalline silicon is a hard and brittle material deforming elastically until it reaches its yield strength, at which point it breaks. Its tensile yield strength is 7 GPa, which is equivalent to a 700-kg (1,500-lb) weight suspended from a 1-mm2 area. Its Young’s modulus is dependent on crystal orientation, being 169 GPa in <110> directions and 130 GPa in <100> directions—near that of steel. The dependence of the mechanical properties on crystal orientation is reflected in the way a silicon wafer preferentially cleaves along crystal planes1.

The surface of silicon oxidizes immediately upon exposure to the oxygen in air (referred to as native oxide). The oxide thickness self-limits at a few nanometers at room temperature. As silicon dioxide is very inert, it acts as a protective layer that prevents chemical reactions with the underlying silicon. 3 Optical reflectivity for silicon and selected metals. ) applications. For example, experiments have shown that silicon remains intact in the presence of Freon™ gases as well as automotive fluids such as brake fluids.

Two planes in the {110} set of planes are identified. (b) The four planes in the {111} family. Note that (111) is the same plane as (111). discussed as if it were simple cubic. In other words, the primitive unit—the smallest repeating block—of the crystal lattice resembles a cube. The three major coordinate axes of the cube are called the principal axes. ” Directions are specified by brackets; for example [100], which is a vector in the +x direction, referred to the three principal axes (x,y,z) of the cube.

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